OCD Solutions

OCD Solutions technology optimizes the full capability and connectivity of the Atlas and IMPULSE systems for optical critical dimension (OCD) metrology. 

Product Overview

Onto Innovation’s OCD technology offers powerful OCD modeling and advanced machine learning capability, as well as next-generation real-time regression, offline sensitivity analysis tools and comprehensive GUI and structure input for true multi-variant modeling. Both the AI-Diffract and SpectraProbe software packages deliver advanced capabilities in intuitive and easy to deploy hardware form factors.

Each component extends seamless OCD capabilities to Atlas standalone and IMPULSE integrated metrology systems, from offline recipe support and development to fab-wide networking and connectivity for easy fleet management.

Learn more about each component below


Comprehensive OCD solutions
Comprehensive OCD solutions

AI-Diffract™ Software

AI-guided OCD modeling and analysis software for high accuracy in-line optical metrology and offline recipe development

AI-Diffract software is a powerful modeling, visualization and analysis software with an intuitive 3D modeling interface to simplify building and visualization of today’s most complex semiconductor devices. AI-Diffract software’s proprietary fitting algorithms enable fast and accurate calculations for signal processing for high fidelity model-based measurements. Automation features for spectral fitting, recipe optimization, and sensitivity analysis offer great user productivity. The first in market AI-guided engine synergizes physics-based modeling and machine learning to deliver the most robust solution with quick time to solution.


SpectraProbe™ Software

Machine Learning engine for on-device excursion, tilt, shift and CD metrology with fast time to solution

SpectraProbe software’s machine learning model-less fitting engine enables fast time to solution for in-line excursion detection, tilt, shift and CD metrology and control. SpectraProbe software complements the high fidelity modeling of AI-Diffract software with a simple machine learning interface for rapid recipe deployment. The software expands the types of structures that can be used for metrology and control including in-die and on-device areas.


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NanoGen™ Server

Enterprise scale computing server deployed for offline recipe development or in-line real-time regression solution

The NanoGen server is an enterprise scale computing hardware system that provides computer-intensive analysis either for offline recipe development or in-line real-time regression solution. The system is optimized to support the workload of AI-Diffract software analysis. 


NanoCentral™ Server

Fab-wide networking and server system for fleet management and connectivity

NanoCentral is a fab-based networking and server system providing connectivity and support to SpectraProbe software, recipe management, feed-forward and Atlas/IMPULSE system fleet management.


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NanoStation™ Workstation

Computer workstation for offline recipe development and data analysis.


NanoApex™ Software

Run-time accelerator for throughput enhancement on Atlas standalone systems



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