OCD Solutions technology optimizes the full capability and connectivity of the Atlas and IMPULSE systems for optical critical dimension (OCD) metrology.
Onto Innovation’s OCD technology offers powerful OCD modeling and advanced machine learning capability, as well as next-generation real-time regression, offline sensitivity analysis tools and comprehensive GUI and structure input for true multi-variant modeling. Both the NanoDiffract software and SpectraProbe software packages deliver advanced capabilities in intuitive and easy to deploy hardware form factors.
Each component extends seamless OCD capabilities to Atlas standalone and IMPULSE integrated metrology systems, from offline recipe support and development to fab-wide networking and connectivity for easy fleet management.
OCD modeling and analysis software for high accuracy in-line optical metrology and offline recipe development
NanoDiffract software is a powerful modeling, visualization and analysis software with an intuitive 3D modeling interface to simplify building and visualization of today’s most complex semiconductor devices. NanoDiffract’s proprietary fitting algorithms enable fast and accurate calculations for signal processing for high fidelity model-based measurements. Automation features for spectral fitting, recipe optimization, and sensitivity analysis offer quick time to solution.
Machine Learning engine for on-device excursion, tilt, shift and CD metrology with fast time to solution
SpectraProbe software’s machine learning model-less fitting engine enables fast time to solution for in-line excursion detection, tilt, shift and CD metrology and control. SpectraProbe software complements the high fidelity modeling of NanoDiffract software with a simple machine learning interface for rapid recipe deployment. The software expands the types of structures that can be used for metrology and control including in-die and on-device areas. Both analysis packages can be deployed directly on-tool in run-time environments and support fleet connectivity as part of a factory control solution.
Enterprise scale computing server deployed for offline recipe development or in-line real-time regression solution
The NanoGen server is an enterprise scale computing hardware system that provides computer-intensive analysis either for offline recipe development or in-line real-time regression solution. The system is optimized to support the workload of NanoDiffract software analysis.
Fab-wide networking and server system for fleet management and connectivity
NanoCentral is a fab-based networking and server system providing connectivity and support to SpectraProbe software, recipe management, feed-forward and Atlas/IMPULSE system fleet management.
Computer workstation for offline recipe development and data analysis.
Run-time accelerator for throughput enhancement on Atlas standalone systems