Customer Support

Your productivity depends on partnering with a supplier that can provide a comprehensive suite of field-established methods and an efficient response system. Your success is our passion.

Reliable Partner

Our global support system is backed by trained applications teams, certified engineers, knowledgeable tech support teams, and uniform practices and procedures to assure consistent, high-quality support for all active equipment and software. Our equipment and process experts have access to the latest information required to address your specific needs.


Worldwide Reach

The world’s leading device manufacturers work side by side with our application engineers and our factory-trained service personnel, exploring new methods to increase yield and improve performance. Our facilities are strategically located in each semiconductor manufacturing region of the world, and our personnel stand ready to respond with a full range of on-site process support solutions.


Continuous Improvement

Our commitment to customer support is ongoing. We take a quality approach to customer service that focuses on a globally-connected support system between corporate functions and branch offices, process improvement initiatives and employee career development.


Contact Technical Support

Formerly Rudolph Technologies

Metrology

1-973-448-4401 metrology.support@ontoinnovation.com

Inspection

1-952-259-1666 inspection.support@ontoinnovation.com

Lithography

1-978-253-6222 lithography.support@ontoinnovation.com

Fabwide Software

1-978-319-4722 ISG.support@ontoinnovation.com

Feedback

customers.first@ontoinnovation.com


Formerly Nanometrics

TPS Helpdesk +1-408-545-NANO (6266)

Corporate +1-408-545-6000 (Option 4)

tps@nanometrics.com




Software Support Portal

Software Support Portal (Formerly Rudolph)