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Your partner for innovative, data-driven solutions that increase yield and profitability.

Onto Innovation collaborates with its customers around the globe to deliver comprehensive, state-of-the-art inspection, measurement, data analysis and lithography solutions for semiconductor manufacturing and advanced packaging processes that accelerate product and process development, increase yields and reduce costs to enable its customers to be first-to-market with premium products at premium prices.

Epi Thickness & Composition

FTIR (Fourier Transform Infrared) is the most important technology for measuring epitaxial film (Epi) thickness, measuring impurities in silicon and monitoring dielectrics, like Borophosphosilicate glass (BPSG), FSG, PSG, etc in semiconductor industry.

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