About Us

A long history of technology innovation

Built on the rich legacies of Nanometrics and Rudolph Technologies, Onto Innovation stands alone in process control with our unique perspective across the semiconductor value chain. We enable our customers to solve their most difficult yield, device performance, quality, and reliability issues. Onto Innovation will optimize customers’ critical path of progress by making them smarter, faster and more efficient. Headquartered in Wilmington, Massachusetts, Onto Innovation supports its customers with a worldwide sales and service organization.

We combine the scale of a global leader with an expanded portfolio of leading-edge technologies that include: unpatterned wafer quality; 3D metrology spanning the chip from nanometer-scale transistors to micron-level die-interconnects; macro defect inspection of wafers and packages; metal interconnect composition; factory analytics; and lithography for advanced semiconductor packaging. The breadth of this portfolio allows us to collaborate with customers about their process yields and process variations from bare silicon wafers through the wafer fab to the final back-end packaging. Onto Innovation’s software brings understanding of how individual processes affect the overall product, enabling customers to improve product quality and reliability.  

Rich Legacies

Both Nanometrics and Rudolph Technologies have a long history of technology innovation. 

Nanometrics was founded in 1975 and is the pioneer and innovator in the field of optical metrology. In 1984, the company started publicly trading. Nanometrics has an extensive installed base of more than 6,500 systems in over 150 production factories worldwide.

Rudolph Technologies began as O.C. Rudolph and Sons in 1940 and later introduced the semiconductor industry's first production-oriented ellipsometer for thin film measurements in 1977. Rudolph became a public company in 1999 and expanded its portfolio to offer a full range of solutions including thin film metrology, defect inspection, enterprise software, and also lithography for advanced packaging applications.


New Beginnings

 The merger of Nanometrics Incorporated and Rudolph Technologies, Inc. to create Onto Innovation Inc. was closed on October 25, 2019.

“By bringing these two companies together, we believe we have created a powerful new choice for customers seeking advanced process control solutions across the semiconductor value chain. Our customers are under increasing pressure to improve device performance, reduce costs, and improve product cycle times. To meet these demands they seek collaborative partners with whom they can work to solve a broader suite of challenges. Onto Innovation will leverage core competencies in software and optics to provide leading edge products in inspection, metrology, lithography, and enterprise process control. We believe our combination of complementary products and an experienced and passionate team will make an ideal choice for customers and create opportunities that increase value to all of our stakeholders, including our employees, customers, and shareholders.” - Mike Plisinski, Chief Executive Officer