Product Overview
The NovusEdge G2 System provides high sensitivity inspection for the edge and backside of bare unpatterned wafers for current and advanced nodes. Multiple modules can be configured on the same automation platform for increased throughput while maintaining a small footprint for an improved cost of ownership. The edge-gripping handling solution for both automation platform and the inspection modules provides desired cleanliness required for wafer manufacturing. Optional high-sensitivity notch inspection can be added to the configuration. Defects detected are automatically classified and binned at run time to reduce manual operator review.
The system is designed as a multipurpose inspection and sorting system for end of line outgoing quality inspection of 300mm unpatterned wafers. The system allows for identifying, inspecting, and sorting the wafers according to freely definable recipes.
The NovusEdge G2 offers higher sensitivity than the previous generation, allowing for sub-micron resolution across all edge and backside inspection. Throughput has been increased by more than 15%, giving customers a lower cost of ownership. Changes to the system simplify user interaction with a focus on ease-of-use, while a new electrical design consumes less power during operation. The enhancements made for the NovusEdge G2 system ensure the tool remains at the leading edge of bare wafer inspection.
Applications
- In-process inspection of unpatterned wafers at the wafer manufacturing site.
- Incoming inspection of unpatterned wafers at outsource subassembly and test providers, integrated device manufacturers, and foundries.
- Process tool qualification and monitoring in conjunction with test wafers.
Specifications
- Submicron edge sensitivity
- Backside sensitivity down to nanometer levels
- Full coverage notch inspection
- Haze
- Sorting capability
- Flexible tool configuration
- Automatic defect classification with customer definable defect classes