Find Support

Worldwide reach, local support

At Onto Innovation, our global support system is ready to respond. Contact our worldwide support group or your local region. Our commitment to quality customer service is ongoing - please send feedback to [email protected].

Regional Technical Product Support

China

Service Support +86 (21) 6093 0600  

[email protected]


Japan

Service Support (Tokyo) +81 3 5745 9301 

Service Support (Yokkaichi) +81 59 351 8577 

Service Support (Kumamoto) +81 96 377 1012

Taiwan

Service Support +886-3-5169230 ext:34 (09:00 -18:00 Mon-Fri Local Time)

Service Support +886-3-5161120 (09:00 018:00 Mon-Fri Local Time)

FAX +886-3-5712075


Singapore

Standby Field Service Engineer / Metrology +65 97360488 (9am-11pm Local Time)

Standby Field Service Engineer / Inspection +65 98558719 (9am-11pm Local Time)

Standby Support Manager +65 97350488 (9am-11pm Local Time)

North America

Service Support (Arizona) +1 480-688-5857

Service Support (Oregon) +1 503-207-4608

Service Support (US) +1 610-905-1929

[email protected]


Korea

Service Support (Hwasung) +82 10 4726 1850

Service Support (Icheon) +82 10 5208 5898


  

Worldwide Technical Product Support

Metrology

[email protected]


Inspection

[email protected]


Lithography

[email protected]