Parts & Logistics

Critical spares when you need them

Our facilities are strategically located in each semiconductor manufacturing region of the world, and our personnel stand ready to respond with a full range of on-site process support solutions.

Inventory

Our multi-million dollar spare parts inventory is designed to support most major and minor component requests. Replacement parts can be expedited from any of our parts depot locations to arrive at your site promptly.

Customer Response Centers

USA: 408 545 6000 (Option 1)

China: +86 21 6093 0600, [email protected]

Europe: +31 6 86 42 82 08, [email protected]


Japan: +81 44 829 6511 or +81 3 5745 9300

Korea: +82 31 713 9705 or +82 31 231 8671 (Ext. 16371)

Singapore: +65 9 736 0488

Taiwan: +883 3 516 1120, [email protected]