Parts & Logistics

Critical spares when you need them

Our facilities are strategically located in each semiconductor manufacturing region of the world, and our personnel stand ready to respond with a full range of on-site process support solutions.

Inventory

Our multi-million dollar spare parts inventory is designed to support most major and minor component requests. Replacement parts can be expedited from any of our parts depot locations to arrive at your site promptly, usually in less than 24 hours.

Customer Response Centers

Formerly Rudolph Technologies

USA: 877.467.8365

China: +86 21 6093 0600

Europe: +44 131 273 4321

Japan: +81 44 829 6511

Korea: +82 31 713 9705

Singapore: +65 6 749 6988

Taiwan: +886 3 516 9230


Formerly Nanometrics

USA: 408-545-6000 (Option 3)

China: +86 21 5854 3030 

Europe: +33 6 70 07 94 85

Japan: +81 3 5745 9305

Korea: +82 31 231 8671 (Ext. 16371)

Singapore: +65 9 736 0488 (9am-11pm Daily Local Time)

Taiwan: +886 3 516 1100 #0