LED and Power

With a growing number of applications for high brightness LEDs and power devices, manufacturers are looking for better strategies to increase yield and improve performance.

Substrate, EPI, Junction

Improve monitoring capabilities with defect and PL metrology

Defect and PL metrology monitoring are important steps for epi wafers in power and LED device manufacturing. Device makers are looking to improve monitoring capabilities by minimizing inspection steps and combining technologies. With its unique optical design technology, the Imperia detects and classifies yield-killing defects with the additional benefit of simultaneous state-of-the-art photoluminescence (PL) production monitoring. There are significant economic savings to be gained by more accurately predicting MOCVD reactor yield and PM schedules. Combining these two post-epitaxial metrology screening functions into a single high throughput system minimizes valuable fab space use and cassette handling time.

Consulting and Applications Services

Onto Innovation's process control consulting services allow busy manufacturers to focus on production while we examine how to improve the process.

The Onto Innovation applications teams have over twenty years of experience with hundreds of successful projects worldwide across multiple industries. Contact us today to discuss your application study needs.

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