Case Study posted on Jul 10, 2018
Discover Software provides visibility and control of all phases of the semiconductor manufacturing process. Run-to-run (R2R) automated process control gathers critical data from each production run and automatically adjusts process parameters for the next run based on sophisticated models of process performance. Fault detection and classification (FDC), works with R2R to prevent model adjustments based on runs that include an equipment fault. Other components of the software suite include: Discover Dashboard, which presents critical information to the operator at-a-glance on a user-configurable dashboard -- the user can easily drill-down to underlying details with a few clicks of a mouse. Discover Yield software uses traditional statistical and multivariate analysis techniques to model process performance and automate yield learning. Discover Defect software and TrueADC® software work together to collect inspection and metrology data and automatically classify defects. Automatic classification allows the operator to focus on yield-limiting defects and ignore nuisance defects, while constant monitoring improves analysis and permits tighter process windows of process data. Finally, AutoShell® software provides a consistent and easy-to-use operator interface for the entire suite.
