Process Control Solutions Enabling High Performance and Efficient MEMS Manufacturing

Abstract

Onto Innovation is a leading supplier of metrology and inspection solutions for advanced semiconductor manufacturing. This presentation will highlight several use cases and key product technologies used to improve process control and enable high volume manufacturing of MEMS devices. Some process control hardware/software solutions include inline metrology, 3D geometry, inspection and closed loop software for increased RF filter device performance and yield; Inspection and process control in microphone manufacturing; and high throughput inspection of BiCMOS circuitry and MEMS in accelerometers and gyroscopes.