Sep 16, 2022 Taipei, Taiwan

Addressing Process Control Solutions in Panel Level Packaging (PLP)

Dr. Monita Pau

Dr. Monita Pau

Presentation at Heterogeneous Integration Global Summit at SEMICON Taiwan
8:30am — 5:00pm

The growth in advanced node die size for high performance computing, artificial intelligence and deep learning applications, the desire to combine differing device node technologies and the growing need for integrated memory technologies, has accelerated the development and production trend towards heterogenous integration with chiplet based architectures. A key part of the delivery of these solutions is Panel Level Packaging (PLP). Onto Innovation is a key supplier of PLP Lithography and Inspection technologies to the Advanced Packaging market today. This presentation will provide a brief introduction to the market growth drivers, an overview of the key panel level processing steps and the types of defects and manufacturing challenges faced as a result in the successful production of PLP based solutions. It will also highlight how the collected process information can provide feedforward adjustment to subsequent manufacturing steps to optimize yield as well as the importance of genealogy information for chiplet integration. We will conclude with a brief introduction to the PLP hardware tools and key software capabilities currently offered, followed by a brief introduction to Onto Innovation.