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Inspection
Automated, high-speed inspection and actionable data analysis for both unpatterned and patterned wafers and panels.
Metrology
Advanced Optical Critical Dimension (OCD) and Film metrology products to help ensure accuracy and repeatability for semiconductor manufacturers worldwide.
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Advanced packaging steppers designed to tackle manufacturing challenges, maximizing throughput while ensuring high resolution and precise overlay
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Empowering digital transformation in semiconductor manufacturing, Onto software connects data for competitive advantage and industry 4.0 success.
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Dedicated to panel-level packaging (PLP) innovations enabling 2.5D, FOPLP, 3D chiplet architectures, and AI packages for both glass and organic substrates (CCL)
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Spotlight
Screenshot 2026-06-04 154559
Moving Defect Detection And Classification To The Edge

The number of defects detected through inspection is exploding at each new process node. There are now millions of defects being identified on each wafer, but only a fraction of those can cause problems.

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Onto Innovation’s products enable advanced logic and memory device technologies that make artificial intelligence (AI) possible
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Explore innovations in autonomous systems powered by AI, MEMs, analog and compound semiconductor technologies
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semitaiwan-18-2
SEMICON Taiwan

Sept 2 — Sept 4, 2026

Onto Innovation is a proud exhibitor at SEMICON Taiwan.

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Onto Innovation to Participate in Upcoming Investor Events
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Onto Innovation Announces Pricing of Upsized Private Offering of $1.3 Billion of 0.00% Convertible Senior Notes Due 2031
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Screenshot 2026-06-04 154559
Moving Defect Detection And Classification To The Edge
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Upcoming Events
semitaiwan-18-2
SEMICON Taiwan

SPIE Photonics West

Jan 20 — Jan 22, 2026
San Francisco, CA

Golden Gate Bridge Sunrise San Francisco California USA

Onto Innovation subsidiary 4D Technology is pleased to exhibit at SPIE Photonics West!

Event Details

Date Jan 20 — Jan 22, 2026
Time 8:00 am — 5:00 pm
Location San Francisco, CA
Exhibit Booth 1355