IVS 280 System
The IVS 280 system delivers overlay, CD and z-height metrology for 100mm-200mm wafers. It is designed to meet the challenging requirements of power, compound semi and MEMS segments.
Product Overview
The IVS 280 system has been designed for ultimate precision, tool induced shift (TIS) and throughput for 100mm to 200mm wafers, with a mean time between failure (MTBF) > 2,000 hours. The IVS 280 system provides the same capability in a system designed for overhead track handling with full capability per SEMI® standards.
Flexibility is key in compound semiconductor processes, accommodating various wafer sizes, thicknesses, and compositions, including versatile wafer handling for Si, SiC, quartz, glass, GaAs, GaN, and LiNO3 wafers.
Its robust wafer handling and navigation system requires no operator assistance during recipe execution. The IVS 280 system enables wafer size changes without hardware alterations. Recipes and data remain stable over time. The system also supports recipe transfers from older IVS platforms like the IVS 200 and IVS 220.
The demonstrated capabilities of the IVS system to perform with high precision and solid reliability set this system apart.
Applications
- Critical Dimension
- On Product Overlay
- Z-Height
Featured Markets
3D Demo
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IVS 380 System
CD Step Application in Edge Air Layer Structure Measurement for Bulk Acoustic Resonator
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