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Inspection

Automated, high-speed inspection and actionable data analysis for both unpatterned and patterned wafers and panels.

Metrology

Advanced Optical Critical Dimension (OCD) and Film metrology products to help ensure accuracy and repeatability for semiconductor manufacturers worldwide.

Lithography

Advanced packaging steppers designed to tackle manufacturing challenges, maximizing throughput while ensuring high resolution and precise overlay

Process Control & Analytics Software

Empowering digital transformation in semiconductor manufacturing, Onto software connects data for competitive advantage and industry 4.0 success.

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Wafer & Panel Manufacturing
CMOS Technologies
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Advanced Packaging
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Customer Success

Service Programs

Providing world-class customer support

Technical Training

Empowering customers to develop tool knowledge and enhance skills through expert-led, hands-on training

Packaging Applications Center of Excellence

Dedicated to panel-level packaging (PLP) innovations enabling 2.5D, FOPLP, 3D chiplet architectures, and AI packages for both glass and organic substrates (CCL)

Solutions

Uniquely tailored hardware and software solutions solving operational or technical problems enabling value beyond the substrate for customers

Spotlight

Moving Defect Detection And Classification To The Edge

The number of defects detected through inspection is exploding at each new process node. There are now millions of defects being identified on each wafer, but only a fraction of those can cause problems.

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Tech Trends

Artificial Intelligence (AI)

Onto Innovation’s products enable advanced logic and memory device technologies that make artificial intelligence (AI) possible

Sustainability

Enabling sustainable innovation through semiconductor solutions for green energy, electric vehicles and power efficiency

Connectivity

Next generation communications technologies rely on advanced wafer materials and process control enabled by Onto Innovation

Autonomous Systems

Explore innovations in autonomous systems powered by AI, MEMs, analog and compound semiconductor technologies

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Upcoming Events

SEMICON Taiwan

Sept 2 — Sept 4, 2026

Onto Innovation is a proud exhibitor at SEMICON Taiwan.

News & Updates

5/19/26

Onto Innovation to Participate in Upcoming Investor Events

05/18/26

Onto Innovation Announces Pricing of Upsized Private Offering of $1.3 Billion of 0.00% Convertible Senior Notes Due 2031

Corporate Responsiblity

Environmental Social Governance

Onto Innovation is dedicated to sustainability and environmental responsibility.

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Whether you’re looking for specific policy details or in-depth reports, this page serves as a valuable resource.

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