AutoShell® Software
AutoShell software accelerates Industry 4.0 adoption by connecting multiple data sources throughout the fab in a single platform.
Product Overview
In a fast-changing industry, AutoShell software ensures competitiveness by seamlessly connecting systems, equipment and people in the factory. Its reliability and uptime make it essential for digital transformation.
AutoShell software unifies products, processes, equipment, stakeholders and facilities through versatile communication protocols across factory networks, optimizing limited IT resources. Its gateway, data acquisition tools, automation suite and multilingual development kit enable efficient data management and communication.
With over 10,000 systems across 500+ product types, AutoShell software empowers customers to execute factory operations without interruption, driving productivity and adaptability. It isn’t just software—it’s the backbone of the future-ready factory.

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ControlWORKS® Software
ControlWORKS software manages equipment-level material handling, factory communication, advanced scheduling and UI development through a comprehensive single machine control platform. This software increases product development efficiency and reduces time to market.
Product Overview
Next-generation technology nodes are advancing faster than process equipment development, challenging manufacturers to shorten product timelines. The ControlWORKS platform streamlines tool automation, allowing engineers to focus on innovation that drives market adoption. Its Object-Oriented Architecture supports swift development of diverse equipment types and processes. The Reusable Class Library enhances exception handling, communication and multitasking. Its SEMI® software compliant design adheres to industry standards (SECS/GEM, EDA, 300mm) and functions across multiple operating systems, including Windows, Linux and VxWorks. Together, these features empower efficient and scalable manufacturing, while ensuring compatibility with industry norms.

Applications
- Logic and Foundry
- SiC and GaN based power devices
- RF Devices
- 3D NAND
- DRAM
- MEMS
Do you have a ControlWORKS software question? Let’s talk!
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Discover how our cutting-edge semiconductor solutions are engineered to meet your most complex challenges: delivering performance, reliability and innovation where it matters most.
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Discover® RMS Software
Discover RMS software is a complete solution for recipe management. This unified repository automatically delivers the right recipe to the right system at the right time.
Product Overview
Discover RMS software is a factory-level recipe management system that provides a central server repository for all recipes. This system allows desktop access for editing and includes complete version control of all recipes used within the fab.
When coupled with Discover Run-to-Run software, it fundamentally tracks all control changes by automatically inserting recipe values into the recipe body. Working in concert with your MES system, recipes are automatically selected and downloaded to the right tool to be executed on the right material. The recipe sign-off feature enforces a tight control of recipes by ensuring customer approval of any large changes.

The Discover RMS Process
Applications
- Memory
- Logic
- ASIC
- Compound Semi
- HDD
- Advanced Packaging
Do you have a Discover RMS software question? Let’s talk!
As your partner for innovative solutions, we’re always here for you.
Discover how our cutting-edge semiconductor solutions are engineered to meet your most complex challenges: delivering performance, reliability and innovation where it matters most.
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