Advanced IC substrates (AICS) have been marching toward the 2µm line/space (L/S) redistribution layer (RDL) technology node for some time (Figure 1). However, many questions remain about the ability of organic substrates to meet the line/space requirements of the next generation of advanced packages (AP), those below 2µm L/S and perhaps to 1.5µm L/S. Simply put: are organic substrates up to the challenge?
The answer to that has been no.
But with recent developments, the possibility of organic substrates reaching below 2µm appears to be changing.
Before we discuss the reasons why, we will first turn our attention to the core reasons organic substrates struggle with lower line/space requirements…
Panel-level advanced packaging technologies have been in development for more than a decade. They began as a way to reduce costs and improve yields for fan-out wafer level applications. Smartphone applications – particularly fingerprint sensors – promised the volumes that would make the investment successful.
However, memories of the fiasco of 450mm wafer efforts lived in the minds of many. Why make the investment in an ecosystem that may not demand high enough volumes to insure return on investment? Still, there were those who believed in the promise of panel-level packaging. Development efforts persevered, and PLP has moved through R&D and into pilot production. Still, through it all, many remained skeptical about there being high enough volumes to support it.
The Era of AI, coupled with the emergence of glass substrates, is set to change all that.
On September 30, 2024, I visited Onto Innovation’s headquarters in Wilmington, MA to attend the grand opening of its Packaging Applications Center of Excellence (PACE). The company has partnered with like-minded suppliers of the PLP ecosystem to accelerate the development of PLP technologies for both organic and glass substrates. These include 3D InCites Members: LPKF Laser & Electronics, Evatec, MKS-Atotech and Lam Research; as well as Resonac, Corning, and others.
The concept of zero defect manufacturing has been around for decades, arising first in the aerospace and defense industry. Since then, this manufacturing approach has been adopted by the automotive industry, and it has only grown in importance as the sector transitions to electric vehicles. Given the role semiconductors play in today’s vehicles, and will play in the future, it is no surprise the industry has adopted a zero defect approach.
However, the quest for zero defect manufacturing goes well beyond the aerospace, defense, and automotive industries. Many companies that have started or are planning digital transformations are pursuing zero defect manufacturing. Accomplishing this requires using data from a wide range of sources, including materials, products, processes, factory subsystems, and equipment. When all of this data is properly integrated, and fabs are able to take complete advantage of the analytics from their monitoring systems, the goal of a zero defect manufacturing environment is achievable.
Before we go any further, we should get one thing out of the way: zero defect manufacturing does not promise zero defects. It is a commitment to properly identifying defects and sources, giving manufacturers the opportunity to detect dormant failures early on and make proactive corrections.
Whether the discussion is about smart manufacturing or digital transformation, one of the biggest conversations in the semiconductor industry today centers on the tremendous amount of data fabs collect and how they utilize that data.
While chip makers are accumulating petabytes of data across the entire semiconductor process, a question arises: how much of that information is being fully utilized? The answer may be around 20%, according to the Semiconductor Engineering article “Too Much Fab and Test Data, Low Utilization.” Unfortunately, this poses a challenge because fab end customers are demanding highly reliable chips, in other words, chips with zero escaping defects and which offer manufacturers clear genealogy and traceability.
Many of you reading this work for companies that have started or are planning digital transformations. To do this, these companies will need to better integrate the data they collect — and that includes data from materials, products, processes, factory subsystems and equipment.
For smart manufacturing to truly live up to its potential, manufacturers will need inline automation that takes complete advantage of the analytics their monitoring systems generate, analytics which can be fed back to the process tools, manufacturing execution systems and other factory systems in real time. Working in concert, these integrated systems are essential to creating a zero defect manufacturing environment.
In the world of smart manufacturing, manufacturers will be tasked with providing timely total solutions to detect and classify defects using inspection and metrology tools, conduct root cause analysis to determine the source of said defects and, finally, employ process control and equipment monitoring using run-to-run and fault detection and classification software solutions to prevent defects from reoccurring.
In this blog, the first in our three-part series “Achieving Zero Defect Manufacturing,” we will focus on detecting and classifying defects. We will start by looking at solutions at the defect level before moving on to the die level and the wafer level.
The United States is seeking to breathe new life into its domestic semiconductor packaging sector with the National Advanced Packaging Manufacturing Program (NAPMP), an initiative to “establish and accelerate domestic capacity for advanced packaging substrates and substrate materials,” according to a Commerce Department announcement from earlier this year [1]. In part, this program is the result of two very distinct trends, both of which are high-priority pursuits for governments and manufacturers. On the one hand, many nations like the U.S. are looking to shore up their semiconductor manufacturing capabilities to better protect themselves from potential geopolitical complications. Still another consideration is today’s rapidly growing demand for high-end applications like artificial intelligence (AI) and high performance computing (HPC) that are driving the need for advanced packages with 2.5 and 3D architectures. Such structures are built upon advanced integrated circuit substrates (AICS). Furthermore, the coming era of glass core substrates in advanced packaging will offer another level of challenges. The future is coming, and few want to be left behind.
Automated optical inspection (AOI) is a cornerstone in semiconductor manufacturing, assembly and testing facilities, and as such, it plays a crucial role in yield management and process control. Traditionally, AOI generates millions of defect images, all of which are manually reviewed by operators. This process is not only time-consuming but error prone due to human involvement and fatigue, which can negatively impact the quality and reliability of the review.
In the Industry 4.0 era, the integration of a deep learning-based automatic defect classification (ADC) software solution marks a significant advancement in manufacturing automation. For one, ADC solutions reduce manual workload – meaning less chance of human error and higher accuracy – and, two, they are poised to lower the costs associated with high-volume manufacturing (HVM).
Deep learning, a branch of machine learning based on artificial neural networks, is at the core of these ADC solutions. It mimics the human brain’s ability to learn and make decisions; this enables the system to recognize complex patterns in data without explicit programming. Compared to traditional methods, this approach offers a significant leap in processing efficiency and accuracy.