ControlWORKS® Software
ControlWORKS software manages equipment-level material handling, factory communication, advanced scheduling and UI development through a comprehensive single machine control platform. This software increases product development efficiency and reduces time to market.
Product Overview
Next-generation technology nodes are advancing faster than process equipment development, challenging manufacturers to shorten product timelines. The ControlWORKS platform streamlines tool automation, allowing engineers to focus on innovation that drives market adoption. Its Object-Oriented Architecture supports swift development of diverse equipment types and processes. The Reusable Class Library enhances exception handling, communication and multitasking. Its SEMI® software compliant design adheres to industry standards (SECS/GEM, EDA, 300mm) and functions across multiple operating systems, including Windows, Linux and VxWorks. Together, these features empower efficient and scalable manufacturing, while ensuring compatibility with industry norms.
Applications
- Logic and Foundry
- SiC and GaN based power devices
- RF Devices
- 3D NAND
- DRAM
- MEMS
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