Packaging Applications Center of Excellence
The Packaging Applications Center of Excellence (PACE) is our newest collaborative space located at Onto Innovation Headquarters in Wilmington, Massachusetts.
Overview
The PACE facility combines the power of Onto Innovation technologies with our network of collaboration partners, aiming to accelerate advanced packaging R&D. This space is equipped with Onto’s next generation panel level photolithography, inspection, and metrology tools, including our latest software capabilities.
PACE Support Process Capabilities
Photoresist and Photo Imageable Dielectric (PID) Coater/Laminator | Dedicated Steppers | Automated Developer | SEM Cross Section | Overlay & CD Metrology | Film Thickness Measurement | Curing Oven | Integrated Solutions | Advanced Process Development | Improved Products & Support | Dedicated Apps Lab Staff
Lab Featured Onto Tools | Industry Partners
Eager to learn more about PACE?
Reach out to Onto Innovation today to discuss collaboration and membership opportunities, lab visits and more. Join our growing list of industry partners!
