4Di InSpec® Surface Gauge
Enhancing quality with this handheld, precision optical instrument for fast, non-contact, 3D measurement of surface features and defects.
4Di InSpec Automated Measurement System (AMS)
The 4Di InSpec AMS qualifies features and defects on complex geometries and in difficult-to-reach locations – hundreds of times faster than manual inspection.
Product Overview
The 4Di InSpec Automated Measurement System is a non-contact optical surface gauge, either the 4D InSpec or 4D InSpec XL, integrated with a choice of collaborative robots, an optional rotary table and a safety cell for rapid production inspection.
This fully automated 3D optical system can measure dozens of edge break features, chamfers, and radii in minutes, vastly improving throughput and driving down inspection costs.
Designed as a turnkey cell for quality control, it is ideal for precision machined components such as turbine blades and rotors, air foils, high pressure compressor blades, blisks and dovetails. The high resolution system can measure in any orientation, on curved surfaces, over large and complex geometries, and in tight spaces or blind locations.
The 4Di InSpec AMS accurately captures complex feature dimensions, enabling more precise part disposition. Its rapid measurement capabilities reduce inspection queuing times, while the ability to measure at multiple locations in the same timeframe ensures part quality.
Applications
- Pits and scratches
- Nicks, dents and bumps
- Edge break, radii and chamfers
- Shot peening and part marking
- Corrosion
Surface System Enhances Shop-Floor Inspection
High-Throughput, High Resolution Defect and Feature Inspection Solution
Driving Down Inspection Time for Critical Aviation and Aerospace Components
4Di InSpec® Surface Gauge
The 4Di InSpec surface gauge is a ground-breaking 3D optical gauge that enables high-resolution, non-contact surface defect and feature measurements right on the shop floor.
Product Overview
The 4Di InSpec optical surface gauge is the first handheld precision instrument designed for non-contact surface defect measurement. With micrometer-level resolution, portability, affordability and ease-of-use, the 4Di InSpec surface gauge brings high resolution 3D surface measurement where it’s needed: on the factory floor, in machine shops, and in field service applications.
This surface gauge provides 3D surface measurements to instantly quantify defects and features up to 100 mils (2,540 micrometers) deep. Without the need for replication, it can measure large components of varying complex geometries directly. It is adaptable for handheld use, workstation setups, or robotic operation with optional accessories to meet specific customer challenges.
Even with its incredible precision and extensive analysis capabilities, its ease of use allows non-experts to take measurements after just minutes of training.
Applications
- Pits and scratches
- Nicks, dents and bumps
- Edge break, radii and chamfers
- Shot peening and part marking
- Corrosion
Featured Markets
4Di InSpec Automated Measurement System (AMS)
High throughput, high resolution automated surface feature and defect measurement solution.
Surface System Enhances Shop-Floor Inspection
Changing Shop Floor Metrology From a Cost to a Benefit
PrecisionWoRx® VX4 System
The PrecisionWoRx VX4 System is designed to provide accurate and repeatable performance through enhanced testing of the latest probe card technologies with tighter pitches, smaller pads and higher pin counts.
Product Overview
The PrecisionWoRx VX4 System gives test facilities and probe card manufacturers the ability to confidently test tighter pitches and smaller probe tips. The system can be configured to meet specific requirements for a variety of probe card technologies. For processes using cards with very small probe tips, the system’s high-resolution optics deliver a detailed field-of-view for high accuracy and repeatability. Proprietary image-processing recipes control over 30 imaging parameters for enhanced testing of most probe tip geometries in use today.
The PrecisionWoRx VX4 System improves overall cost of ownership with faster test times for common tests, including leakage, planarity, alignment, contact resistance, probe force and wire checker. Its sophisticated electrical discharge management capability maintains 1-volt continuity to the probe during electrical testing. Productivity-enhanced routines for automated testing of failed probes and a wide variety of checkplates suit an extensive range of process and technology requirements. The system provides support for the most complex probe card technologies.
Applications
- Various probe tips from 5 µm up to 250 µm diameter
- Z force up to 200 KG
- Pin counts >100,000 probes
- Direct dock probe card capabilities
- Probe card relay and solid-state switching
- Membrane probe cards
Featured Markets
PrimaScan™ System
All-surface defect and contamination inspection for unpatterned wafer and blanket films, with imaging capability for opaque, transparent and semi-transparent wafers, reticles and piece parts.
PrimaScan™ R&D System
All-surface defect and contamination inspection for unpatterned wafer and blanket films, with imaging capability for opaque, transparent and semi-transparent wafers, reticles and piece parts.
Dragonfly® G3 System
Automated high speed sub-micron 2D inspection and 3D inspection/metrology for inline process control of pattern defects in next generation technologies for advanced packaging, specialty and OQA.
NovusEdge® G2 System
Unpatterned edge, notch and backside inspection.
Celero™ PL System
Subsurface defect and crystalline defect inspection and classification in bulk and epitaxial III-V materials for application in power semiconductors.
EB40™ Module
Edge and backside inspection.
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PrimaScan™ R&D System
The PrimaScan R&D System is a stand-alone, manual load version of the PrimaScan automated wafer defect and contamination inspection system that has been specifically designed with R&D and lab environments in mind.
Product Overview
The PrimaScan R&D system offers a smaller spot size and higher pixel resolution than its high volume production counterpart tools. The flexibility in sample handling options combined with the multiple sensing channels and higher resolution imaging makes this the ideal tool for R&D and lab environments. Similar to the other tools in the PrimaScan line, the PrimaScan R&D system offers reliable inspection of nanometer sized defects on a variety of opaque and transparent/semi-transparent substrates and samples suitable for either R&D or lab environments. The system can detect, measure, characterize and image surface particles, scratches, pits, bumps, surface contamination, film or bulk wafer stress, voids/inclusions, including chips and cracks at the wafer edge.
Designed with versatility in mind the PrimaScan R&D system can handle a variety of wafer sizes and substrate types including film frame, photomask and sample tray.
Applications
- Opaque or transparent wafer incoming quality (ICQ) inspection
- Process monitor wafer particle and contamination inspection
- Unpatterned blanket photoresist, dielectric or metallic coated wafer defect inspection
- Subsurface defectivity inspection for transparent and semi-transparent films and substrates
- Glass wafer defect and contamination inspection for microfluidics, microlens arrays for AR/VR/MR, flat optics, etc.
- Post-CMP or post-grind defect inspection
PrimaScan™ System
All-surface defect and contamination inspection for unpatterned wafer and blanket films, with imaging capability for opaque, transparent and semi-transparent wafers, reticles and piece parts.
PrimaScan™ P System
All-surface defect and contamination inspection for unpatterned glass panel substrates with imaging capability for panels up to 600x600mm in size.
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Discover how our cutting-edge semiconductor solutions are engineered to meet your most complex challenges: delivering performance, reliability and innovation where it matters most.
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Optical measurement technology delivers nanometer resolution for real-time roughness analysis.
Surface roughness is the deviation of a surface from its ideal form. The larger the deviation, the rougher the surface. When using a 2D measurement technique, the roughness average is represented as Ra, while it is known as Sa when calculating roughness from 3D area measurements.
Most machined surfaces have an average roughness (Sa) of 200 nanometers (nm) to 2 µm (8 to 80 µin but can go down to less than 25nm. Traditionally, surface roughness has been measured using either subjective visual tests or two-dimensional (2D) stylus tools. For aerospace components, deviations from surface roughness specifications can cause performance issues such as increased wear, fracturing, disrupted fluid or air flow, poor adhesion of coatings and lubricants, and reduced corrosion resistance.
While visual testing techniques are inexpensive and easy to use, they do not deliver quantitative results. They cannot meet the gage repeatability standards many aerospace manufacturers require.
Using a 2D stylus offers quantifiable results, but faces hurdles in meeting gage repeatability standards, especially on the shop floor. The 2D stylus offers only a single trace with limited data points, and the results are directionally dependent-based on whether the scan is performed horizontally, vertically, or at an angle across the sample surface. Measuring corners and odd angles adds further challenges. The resolution of a 2D stylus system also depends on the size of the stylus tip.
Additionally, a 2D stylus is a contact-based tool. It can be damaged when measuring parts, especially at the edges, and can potentially damage the part itself.
Traditional quality control lab 3D optical profilers offer many advantages over 2D tools, including higher resolution, a larger measurement area of 3D data, and a true 3D Sa value. But they are limited by long turnaround times and the need to replicate large parts that do not fit under the microscope. They are also vibration-sensitive and require stable platforms, making them impractical for shop-floors.
The 4Di InSpec SR, addresses these challenges with a portable 3D surface gauge that delivers microscope-quality nanometer resolution measurements in real time. With a field of view of 1mm x 0.8mm, the measurement system acquires millions of data points in a single area, with a roughness accuracy of u0026lt;0.5%, and can measure machined surfaces from mirror-smooth to sandpaper-rough.rnrnThe system enables in situ surface finish and roughness measurements below 25 nanometers in seconds, while meeting gage repeatability standards. Machinists can achieve surface finishes at very small scales, creating performance improvements whether the part is a turbine blade or rivet on a wing.
The 4Di InSpec SR displays the surface roughness of a bare wafer
The 4Di InSpec SR measures roughness on large components without the need for replication by bringing the system directly to the part. Its scratch-free optical technology eliminates surface damage concerns. The system employs vibration-immune technology, enabling fast quantification of surface roughness for both smooth and rough components on the shop floor.
3D roughness at 188nm on a machined metal component
A significant capability of the 4Di InSpec SR is its robot compatibility for automated measurements. Looking to the future, there are numerous opportunities to extend its benefits in shop floor applications, including automation integration, multi-sensor systems for macro and micro level measurements, and advanced predictive analytics capabilities.
The 4Di InSpec SR represents a significant advancement in quality control technology, offering aerospace manufacturers a unique real-time, shop floor surface measurement solution that bridges the gap between traditional laboratory precision and production-line practicality.
The 4Di InSpec automated metrology system (AMS) is a high-throughput, high resolution defect and feature inspection solution. The automated system can measure dozens of edge break features, chamfers, and radii in minutes rather than days, vastly improving throughput and driving down inspection costs. The 4Di InSpec AMS integrates a non-contact 4D InSpec or 4D InSpec XL surface gage with a collaborative robot and other automation for rapid production inspection. 4Di InSpec AMS systems are the turnkey option for quality control of aerospace components such as turbine blades and rotors, air foils, high pressure compressor blades, blisks, and dovetails. The high resolution gage measures in any orientation, on curved surfaces, over large and complex geometries, and in tight spaces or blind locations. The 4Di InSpec AMS instantly produces high resolution, 3D measurement results, with far more information than other methods. An inspector can immediately see both an image of the feature and easy-to-read statistics. User-friendly measurement automation software flags any out-of-spec measurements and automatically remeasures the locations.
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