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Advanced Optical Critical Dimension (OCD) and Film metrology products to help ensure accuracy and repeatability for semiconductor manufacturers worldwide.
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Spotlight
The Specialty Device Surge Part 1
The Specialty Device Surge Part 1: Wafer Size Transitions Are Powering the Future of Specialty Devices and Bringing New Challenges

Specialty devices are the unsung heroes of modern life. For many in the semiconductor industry today, the spotlight is on the SiC and GaN power devices used in automotive, green energy, fast-charge consumer electronics (CE), and high-performance computing (HPC) applications.

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Onto Innovation’s products enable advanced logic and memory device technologies that make artificial intelligence (AI) possible
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Explore innovations in autonomous systems powered by AI, MEMs, analog and compound semiconductor technologies
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May 5 — May 7, 2026

Onto Innovation is a proud exhibitor at SEMICON Southeast Asia.

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03/16/26
Onto Innovation Launches Dragonfly® G5 Inspection System
02/25/26
Onto Innovation to Participate in Upcoming Investor Events
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Spotlight
The Specialty Device Surge Part 1
The Specialty Device Surge Part 1: Wafer Size Transitions Are Powering the Future of Specialty Devices and Bringing New Challenges
  • Artificial Intelligence (AI)
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