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Automated, high-speed inspection and actionable data analysis for both unpatterned and patterned wafers and panels.
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Advanced Optical Critical Dimension (OCD) and Film metrology products to help ensure accuracy and repeatability for semiconductor manufacturers worldwide.
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Spotlight
dec 2025 blog
Smaller Geometries, Bigger Demands: The Role of OCD in GAA Logic and Vertical Gate DRAM Process Control

AI workloads are pushing the boundaries of compute, memory, and interconnect architectures, and to meet these goals, manufacturers are rapidly accelerating advanced logic and DRAM development.

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seoul-korea
SEMICON Korea

Feb 11 — Feb 13, 2026

Onto Innovation is a proud exhibitor at SEMICON Korea

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11/17/25
Onto Innovation Completes Acquisition of Unique Materials Composition and Electrical Analysis Product Lines from Semilab International
11/11/25
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Spotlight
dec 2025 blog
Smaller Geometries, Bigger Demands: The Role of OCD in GAA Logic and Vertical Gate DRAM Process Control
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Upcoming Events
seoul-korea
SEMICON Korea

SPIE Photonics West

Jan 20 — Jan 22, 2026
San Francisco, CA

Golden Gate Bridge Sunrise San Francisco California USA

Onto Innovation subsidiary 4D Technology is pleased to exhibit at SPIE Photonics West!

Event Details

Date Jan 20 — Jan 22, 2026
Time 8:00 am — 5:00 pm
Location San Francisco, CA
Exhibit Booth 1355