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Inspection
Automated, high-speed inspection and actionable data analysis for both unpatterned and patterned wafers and panels.
Metrology
Advanced Optical Critical Dimension (OCD) and Film metrology products to help ensure accuracy and repeatability for semiconductor manufacturers worldwide.
Lithography
Advanced packaging steppers designed to tackle manufacturing challenges, maximizing throughput while ensuring high resolution and precise overlay
Process Control & Analytics Software
Empowering digital transformation in semiconductor manufacturing, Onto software connects data for competitive advantage and industry 4.0 success.
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Packaging Applications Center of Excellence
Dedicated to panel-level packaging (PLP) innovations enabling 2.5D, FOPLP, 3D chiplet architectures, and AI packages for both glass and organic substrates (CCL)
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Uniquely tailored hardware and software solutions solving operational or technical problems enabling value beyond the substrate for customers
Spotlight
Screenshot 2026-06-04 154559
Moving Defect Detection And Classification To The Edge

The number of defects detected through inspection is exploding at each new process node. There are now millions of defects being identified on each wafer, but only a fraction of those can cause problems.

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Onto Innovation’s products enable advanced logic and memory device technologies that make artificial intelligence (AI) possible
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Enabling sustainable innovation through semiconductor solutions for green energy, electric vehicles and power efficiency
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Next generation communications technologies rely on advanced wafer materials and process control enabled by Onto Innovation
Autonomous Systems
Explore innovations in autonomous systems powered by AI, MEMs, analog and compound semiconductor technologies
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semitaiwan-18-2
SEMICON Taiwan

Sept 2 — Sept 4, 2026

Onto Innovation is a proud exhibitor at SEMICON Taiwan.

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5/19/26
Onto Innovation to Participate in Upcoming Investor Events
05/18/26
Onto Innovation Announces Pricing of Upsized Private Offering of $1.3 Billion of 0.00% Convertible Senior Notes Due 2031
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Screenshot 2026-06-04 154559
Moving Defect Detection And Classification To The Edge
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Upcoming Events
semitaiwan-18-2
SEMICON Taiwan