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Automated, high-speed inspection and actionable data analysis for both unpatterned and patterned wafers and panels.
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Advanced Optical Critical Dimension (OCD) and Film metrology products to help ensure accuracy and repeatability for semiconductor manufacturers worldwide.
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Spotlight
dec 2025 blog
Smaller Geometries, Bigger Demands: The Role of OCD in GAA Logic and Vertical Gate DRAM Process Control

AI workloads are pushing the boundaries of compute, memory, and interconnect architectures, and to meet these goals, manufacturers are rapidly accelerating advanced logic and DRAM development.

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SEMICON Korea

Feb 11 — Feb 13, 2026

Onto Innovation is a proud exhibitor at SEMICON Korea

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12/22/25
Onto Innovation Receives TSMC Honor for “Excellent Production Support”
11/17/25
Onto Innovation Completes Acquisition of Unique Materials Composition and Electrical Analysis Product Lines from Semilab International
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Spotlight
dec 2025 blog
Smaller Geometries, Bigger Demands: The Role of OCD in GAA Logic and Vertical Gate DRAM Process Control
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Upcoming Events
seoul-korea
SEMICON Korea

SEMICON Europa

Nov 18 — Nov 21, 2025
Munich, Germany

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Onto Innovation is excited to see you at SEMICON Europa 2025!
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Register for Onto’s Technical Symposium

In conjunction with SEMICON Europa, we are pleased to host the Onto Innovation Forum: Next Generation Process Control Technologies for European Semiconductor Markets on November 19. Registration is required for this free one-day event.

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Event Details

Date Nov 18 — Nov 21, 2025
Time 10:00am — 5:00pm
Location Munich, Germany
Exhibit Booth B1712