The Dragonfly® G5 macro inspection system — built for your process.
Whatever your process demands, the Dragonfly G5 macro inspection system is built to meet it. It puts control back in your hands and delivers the performance you need at a lower total cost of ownership — so you get the results that matter, without the tradeoffs.
Let’s connect. Schedule a meeting and take a piece of the Dragonfly® G5 story with you.

See why more customers are choosing the Dragonfly G5 Inspection System.
PERFORMANCE |
SENSITIVITY |
TIME TO SOLUTION |
ACCURACY |
| Purpose-built for today’s performance challenges and designed to grow with your roadmap | Detects the smallest defects with 150nm sensitivity and reveals organic defects with Clearfind® technology | Reduces total cycle time, leveraging advanced stage technology, TrueADC® and CAD-based recipe creation |
Optimized stage design with increased sensitivity and vibration resistance, delivering the highest defect confidence |
CONFIDENCE |
VERSATILITY |
FLEXIBILITY |
COST OF OWNERSHIP |
|
Leveraging high signal-to-noise ratio (SNR) data, an advanced AI-based defect classifier reduces nuisance defects to deliver solution confidence |
Choose from 7 objectives and 4 sensors. Multi-modal illumination covers surface 2D/3D, sub-surface and hidden defects across diverse applications. | Purpose-built for multiple substrate types — film frame, 310×310mm glass and wafer — delivering a truly flexible solution. |
Reduced cost per wafer with high-throughput inspection and optimized handling |
Take control: See more. Save more.
The Dragonfly G5 delivers the results you need at a lower cost. It’s a platform built to fit your process. Let’s talk about what it can do for your yield, your throughput and your bottom line.
Meet with our team, discover what’s possible & take a piece of the Dragonfly G5 story with you!
Let’s Talk
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