ECV Pro™ System

The ECV Pro system was designed, from the ground up, to eliminate all operator dependent variations in the data.

Product Overview

The ECV Pro system is the industry standard for measuring active carrier concentration profiles in semiconductor layers. The system’s newly designed digital electronics eliminate drift and significantly improve signal to noise ratio. The unique design of the ECV Pro system eliminates all operator dependent variations in the data.

Introducing the first in-situ camera, ECVision, enabling the user to image semiconductor/electrolyte interfaces. It also delivers novel insight of film removal or defect revelation during the etch process.

The ECV Pro system software is built on industry standard SEMI E-95 guidelines. This software supports automated profiling and is programmed to generate process control charts.


ECV Pro System
ECV Pro System

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