Jun 28, 2022 Brussels, Belgium

Enabling High Productivity for GaN Manufacturing Ramp

Dr. Wei Zhao

Dr. Wei Zhao

Presentation at CS International
2:15pm — 2:45pm

Today’s rapidly evolving end market application segments have centered on several key areas of future growth: the increased mobility of Consumer applications, Electric Vehicles and 5G communications. At the core of each of these market segments are a class of GaN based devices more specifically known as High Electron Mobility Transistors (HEMT) devices indispensable in applications that range from Onboard Charging in EVs, to Fast Charge Adaptors in the Mobile Computing and Cell Phone Markets, and to, high speed/high power switches in base stations enabling 5G communications. Developing this class of energy efficient device technologies requires state of the art measurement and inspection technologies for precision in materials development. This presentation introduces Onto Innovation and discusses how its Metrology and Inspection measurement technologies together with Ecosystem Software products enable wafer measurement and real-time feedback and control of the process equipment used in the development of GaN based technologies in high volume manufacturable (HVM) processes.